Tech Brief: A Look at Atomic Layer Deposition (ALD) | Lam Research
Atomic Layer Deposition for Emerging Thin-film Materials and Applications
Applications of atomic layer deposition and chemical vapor deposition for perovskite solar cells - Energy & Environmental Science (RSC Publishing)
Atomic‐Layer‐Deposition‐Based 2D Transition Metal Chalcogenides: Synthesis, Modulation, and Applications - Nano Market
Atomic Layer Deposition - Advanced Nanomaterials for Clean Energy Group - Western University
Chemical vapor deposition and atomic layer deposition for advanced lithium ion batteries and supercapacitors - Energy & Environmental Science (RSC Publishing)
Applications of atomic layer deposition to nanofabrication and emerging nanodevices - ScienceDirect
Atomic/molecular layer deposition for energy storage and conversion - Chemical Society Reviews (RSC Publishing) DOI:10.1039/D0CS00156B
The Commercial Adoption of Atomic Layer Deposition
Journal of Materials Research: Volume 35 - Focus Issue: Atomic Layer Deposition for Emerging Thin-Film Materials and Applications | Cambridge Core
Chemical vapor deposition and atomic layer deposition for advanced lithium ion batteries and supercapacitors | Semantic Scholar
Emerging applications of atomic layer deposition for the rational design of novel nanostructures for surface-enhanced Raman scattering - Journal of Materials Chemistry C (RSC Publishing)
Atomic Layer Deposition Expected to Grow to Meet Demand for More-than-Moore Devices and Applications | SEMI
PDF) Nanocoatings by Atomic Layer Deposition for Medical Applications